Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12018672 | Precision volumetric pump with a bellows hermetic seal | Dale Lee Heintzelman, John Fulton, Andrew Shaw, Victoria Danner, Mindy Darosa | 2024-06-25 |
| 9324567 | Gas cluster ion beam etching process for etching Si-containing, Ge-containing, and metal-containing materials | Martin D. Tabat, Christopher K. Olsen, Yan Shao, Luis Fernandez | 2016-04-26 |
| 8557710 | Gas cluster ion beam etching process for metal-containing materials | Yan Shao, Martin D. Tabat, Christopher K. Olsen | 2013-10-15 |
| 8513138 | Gas cluster ion beam etching process for Si-containing and Ge-containing materials | Yan Shao, Martin D. Tabat, Christopher K. Olsen | 2013-08-20 |
| 8512586 | Gas cluster ion beam etching process for achieving target etch process metrics for multiple materials | Martin D. Tabat, Christopher K. Olsen, Yan Shao | 2013-08-20 |
| 8298432 | Method and system for adjusting beam dimension for high-gradient location specific processing | Nicolaus J. Hofmeester, Steven P. Caliendo | 2012-10-30 |
| 8293126 | Method and system for multi-pass correction of substrate defects | Nicolaus J. Hofmeester, Steven P. Caliendo | 2012-10-23 |
| 7564024 | Methods and apparatus for assigning a beam intensity profile to a gas cluster ion beam used to process workpieces | Nicolaus J. Hofmeester, Steven P. Caliendo, Thomas G. Tetreault | 2009-07-21 |