Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9540725 | Method and apparatus for beam deflection in a gas cluster ion beam system | Kenneth Regan, Yan Shao, Robert K. Becker | 2017-01-10 |
| 9324567 | Gas cluster ion beam etching process for etching Si-containing, Ge-containing, and metal-containing materials | Martin D. Tabat, Yan Shao, Ruairidh MacCrimmon, Luis Fernandez | 2016-04-26 |
| 8728947 | Gas cluster ion beam process for opening conformal layer in a high aspect ratio contact via | Luis Fernandez | 2014-05-20 |
| 8722542 | Gas cluster ion beam process for opening conformal layer in a high aspect ratio contact via | Luis Fernandez | 2014-05-13 |
| 8557710 | Gas cluster ion beam etching process for metal-containing materials | Yan Shao, Martin D. Tabat, Ruairidh MacCrimmon | 2013-10-15 |
| 8512586 | Gas cluster ion beam etching process for achieving target etch process metrics for multiple materials | Martin D. Tabat, Yan Shao, Ruairidh MacCrimmon | 2013-08-20 |
| 8513138 | Gas cluster ion beam etching process for Si-containing and Ge-containing materials | Yan Shao, Martin D. Tabat, Ruairidh MacCrimmon | 2013-08-20 |
| 5433441 | Golf putter with cylindrical clubhead | Charles Tomasino | 1995-07-18 |
| 4759482 | Holster for pistol | — | 1988-07-26 |