| 9540725 |
Method and apparatus for beam deflection in a gas cluster ion beam system |
Kenneth Regan, Yan Shao, Christopher K. Olsen |
2017-01-10 |
| 9343259 |
GCIB nozzle assembly |
Matthew C. Gwinn, Avrum Freytsis |
2016-05-17 |
| 9305746 |
Pre-aligned nozzle/skimmer |
Avrum Freytsis |
2016-04-05 |
| 9029808 |
Low contamination scanner for GCIB system |
Matthew C. Gwinn, Avrum Freytsis, Jerry Negrotti |
2015-05-12 |
| 8981322 |
Multiple nozzle gas cluster ion beam system |
Martin D. Tabat, Matthew C. Gwinn, Avrum Freytsis, Michael Graf |
2015-03-17 |
| 8338806 |
Gas cluster ion beam system with rapid gas switching apparatus |
Michael Graf, Christopher T. Reddy, Noel Russell |
2012-12-25 |
| 8304033 |
Method of irradiating substrate with gas cluster ion beam formed from multiple gas nozzles |
Martin D. Tabat, Matthew C. Gwinn, Avrum Freytsis, Michael Graf |
2012-11-06 |
| 8097860 |
Multiple nozzle gas cluster ion beam processing system and method of operating |
Martin D. Tabat, Matthew C. Gwinn, Avrum Freytsis, Michael Graf |
2012-01-17 |
| 7060988 |
Method and apparatus for improved beam stability in high current gas-cluster ion beam processing system |
Michael E. Mack, Matthew C. Gwinn |
2006-06-13 |
| 6676989 |
Method and system for improving the effectiveness of medical stents by the application of gas cluster ion beam technology |
Allen R. Kirkpatrick, Avrum Freytsis |
2004-01-13 |