Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Multiple nozzle gas cluster ion beam processing system and method of operating

Multiple nozzle gas cluster ion beam processing system and method of operating

US Patent 8097860 · Granted Jan 17, 2012

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Substrate scanning apparatus with pendulum and rotatable substrate holder2025
Wafer scanning apparatus and method for focused beam processing2024
Tuning gas cluster ion beam systems2023
Tuning gas cluster ion beam systems2023
Pattern enhancement using a gas cluster ion beam2023
Wafer scanning apparatus and method for focused beam processing2023
Pattern enhancement using a gas cluster ion beam2022
Compensated location specific processing apparatus and method2020
Compensated location specific processing apparatus and method2020
Compensated location specific processing apparatus and method2020
Compensated location specific processing apparatus and method2019
Compensated location specific processing apparatus and method2019