Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11715620 | Tuning gas cluster ion beam systems | Matthew C. Gwinn, Martin D. Tabat | 2023-08-01 |
| 10861674 | Compensated location specific processing apparatus and method | Matthew C. Gwinn, Martin D. Tabat, Allen J. Leith, Michael Graf | 2020-12-08 |
| 10497540 | Compensated location specific processing apparatus and method | Matthew C. Gwinn, Martin D. Tabat, Allen J. Leith, Michael Graf | 2019-12-03 |
| 9540725 | Method and apparatus for beam deflection in a gas cluster ion beam system | Yan Shao, Robert K. Becker, Christopher K. Olsen | 2017-01-10 |
| 8169769 | Electrostatic chuck power supply | — | 2012-05-01 |
| 7948734 | Electrostatic chuck power supply | — | 2011-05-24 |
| 7834327 | Self-biasing active load circuit and related power supply for use in a charged particle beam processing system | — | 2010-11-16 |
| 7345856 | Method and apparatus for arc suppression in scanned ion beam processing equipment | — | 2008-03-18 |