Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9187313 | Anodically bonded strain isolator | Mark Eskridge | 2015-11-17 |
| 8418555 | Bidirectional, out-of-plane, comb drive accelerometer | Michael Foster | 2013-04-16 |
| 8404568 | Systems and methods for fabricating an out-of-plane MEMS structure | Michael Foster | 2013-03-26 |
| 7830003 | Mechanical isolation for MEMS devices | Michael Foster, Ijaz Jafri, Mark Eskridge | 2010-11-09 |
| 7690254 | Sensor with position-independent drive electrodes in multi-layer silicon on insulator substrate | Jorg Pilchowski, Michael Foster | 2010-04-06 |
| 7649432 | Three-dimensional microstructures having an embedded and mechanically locked support member and method of formation thereof | David W. Sherrer, Christopher A. Nichols | 2010-01-19 |
| 7487678 | Z offset MEMS devices and methods | Michael Foster | 2009-02-10 |