Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8685776 | Wafer level packaged MEMS device | Lianzhong Yu | 2014-04-01 |
| 7949508 | Low vibration rectification in a closed-loop, in-plane MEMS device | — | 2011-05-24 |
| 7720661 | Low vibration rectification in a closed-loop, in-plane MEMS device | — | 2010-05-18 |
| 7516661 | Z offset MEMS device | Jonathan L. Klein, Galen Magendanz, Mark Williams, Michael Foster | 2009-04-14 |
| 7469588 | MEMS vertical comb drive with improved vibration performance | Lianzhong Yu | 2008-12-30 |
| 7350415 | Closed-loop comb drive sensor | — | 2008-04-01 |
| 7238999 | High performance MEMS packaging architecture | Lianzhong Yu | 2007-07-03 |
| 5287744 | Accelerometer with flexure isolation | Brian L. Norling, Mitchell Novack | 1994-02-22 |