Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10954119 | MEMS micromirror and MEMS optical switch | Hang Li, Chen Sun | 2021-03-23 |
| 10647570 | Fabrication process for a symmetrical MEMS accelerometer | Chen Sun, Leiyang Yi | 2020-05-12 |
| 10392247 | Fabrication process for a symmetrical MEMS accelerometer | Chen Sun, Leiyang Yi | 2019-08-27 |
| 9759740 | Symmetrical MEMS accelerometer and its fabrication process | Chen Sun, Leiyang Yi | 2017-09-12 |
| 8685776 | Wafer level packaged MEMS device | Peter H. LaFond | 2014-04-01 |
| 8481354 | Methods of creating a micro electro-mechanical systems accelerometer using a single double silicon-on-insulator wafer | — | 2013-07-09 |
| 8057690 | Single silicon-on-insulator (SOI) wafer accelerometer fabrication | — | 2011-11-15 |
| 7976714 | Single SOI wafer accelerometer fabrication process | — | 2011-07-12 |
| 7482192 | Method of making dimple structure for prevention of MEMS device stiction | Ken L. Yang | 2009-01-27 |
| 7479402 | Comb structure fabrication methods and systems | — | 2009-01-20 |
| 7469588 | MEMS vertical comb drive with improved vibration performance | Peter H. LaFond | 2008-12-30 |
| 7442589 | System and method for uniform multi-plane silicon oxide layer formation for optical applications | Ken L. Yang, Thomas Keyser | 2008-10-28 |
| 7238999 | High performance MEMS packaging architecture | Peter H. LaFond | 2007-07-03 |
| 7152473 | Integrated and multi-axis sensor assembly and packaging | Larry Rushefsky, Axel Michael Sigmar, Howard D. Goldberg, W. Marc Stalnaker, Ray Rinne +14 more | 2006-12-26 |
| 7024934 | Vibrating beam accelerometer | — | 2006-04-11 |
| 6938334 | Vibrating beam accelerometer two-wafer fabrication process | — | 2005-09-06 |
| 6805008 | Accelerometer with folded beams | Arjun Selvakumar, Duli Yu, Ben Jones | 2004-10-19 |
| 6617098 | Merged-mask micro-machining process | Robert Ried, Howard D. Goldberg, Duli Yu | 2003-09-09 |
| 6458513 | Temporary bridge for micro machined structures | Howard D. Goldberg, Duli Yu | 2002-10-01 |
| 6454421 | Dual axis micro machined mirror device | Duli Yu, Howard D. Goldberg, Martin Schmidt | 2002-09-24 |
| 6315423 | Micro machined mirror | Duli Yu, Howard D. Goldberg, Martin Schmidt, Robert Ried | 2001-11-13 |