Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10647570 | Fabrication process for a symmetrical MEMS accelerometer | Lianzhong Yu, Chen Sun | 2020-05-12 |
| 10392247 | Fabrication process for a symmetrical MEMS accelerometer | Lianzhong Yu, Chen Sun | 2019-08-27 |
| 9759740 | Symmetrical MEMS accelerometer and its fabrication process | Lianzhong Yu, Chen Sun | 2017-09-12 |