Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7482192 | Method of making dimple structure for prevention of MEMS device stiction | Lianzhong Yu | 2009-01-27 |
| 7442589 | System and method for uniform multi-plane silicon oxide layer formation for optical applications | Lianzhong Yu, Thomas Keyser | 2008-10-28 |