| 11078907 |
Scroll type micro-compressor, and method for machining fixed scroll plate and orbit scroll plate thereof |
Xiaoxing Xing, Chaomin Zhang |
2021-08-03 |
| 8322216 |
Micromachined accelerometer with monolithic electrodes and method of making the same |
Fangfang Feng, Kedu Han |
2012-12-04 |
| 7274079 |
Sensor design and process |
Arjun Selvakumar, Howard D. Goldberg, Matthew W. Ip, Martin Schmidt, James L. Marsh +2 more |
2007-09-25 |
| 7236279 |
Digital optical switch apparatus and process for manufacturing same |
Arjun Selvakumar, Howard D. Goldberg, Taechung Yi |
2007-06-26 |
| 7152473 |
Integrated and multi-axis sensor assembly and packaging |
Larry Rushefsky, Axel Michael Sigmar, Howard D. Goldberg, W. Marc Stalnaker, Ray Rinne +14 more |
2006-12-26 |
| 6945110 |
Sensor design and process |
Arjun Selvakumar, Howard D. Goldberg, Matthew W. Ip, Martin Schmidt, James L. Marsh +2 more |
2005-09-20 |
| 6871544 |
Sensor design and process |
Arjun Selvakumar, Howard D. Goldberg, Matthew W. Ip, Martin Schmidt, James L. Marsh +2 more |
2005-03-29 |
| 6861587 |
Low stress die attachment |
Arjun Selvakumar, James L. Marsh, Howard D. Goldberg, W. Marc Stalnaker |
2005-03-01 |
| 6805008 |
Accelerometer with folded beams |
Arjun Selvakumar, Lianzhong Yu, Ben Jones |
2004-10-19 |
| 6617098 |
Merged-mask micro-machining process |
Lianzhong Yu, Robert Ried, Howard D. Goldberg |
2003-09-09 |
| 6458513 |
Temporary bridge for micro machined structures |
Lianzhong Yu, Howard D. Goldberg |
2002-10-01 |
| 6454421 |
Dual axis micro machined mirror device |
Lianzhong Yu, Howard D. Goldberg, Martin Schmidt |
2002-09-24 |
| 6315423 |
Micro machined mirror |
Lianzhong Yu, Howard D. Goldberg, Martin Schmidt, Robert Ried |
2001-11-13 |