Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Merged-mask micro-machining process

Merged-mask micro-machining process

US Patent 6617098 · Granted Sep 9, 2003

Estimated economic value: $3,808,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Scroll type micro-compressor, and method for machining fixed scroll plate and or2021
MEMS micromirror and MEMS optical switch2021
Fabrication process for a symmetrical MEMS accelerometer2020
Fabrication process for a symmetrical MEMS accelerometer2019
Symmetrical MEMS accelerometer and its fabrication process2017
Device and method for recording and transmitting interval data from a container 2016
Wafer level packaged MEMS device2014
Methods of creating a micro electro-mechanical systems accelerometer using a sin2013
Container cap with a timer2013
Micromachined accelerometer with monolithic electrodes and method of making the 2012
Single silicon-on-insulator (SOI) wafer accelerometer fabrication2011
Intrinsically safe compliant circuit element spacing2011