Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 6617098 | Merged-mask micro-machining process | Lianzhong Yu, Howard D. Goldberg, Duli Yu | 2003-09-09 | $3,808,000 |
| 6315423 | Micro machined mirror | Duli Yu, Lianzhong Yu, Howard D. Goldberg, Martin Schmidt | 2001-11-13 | $5,630,000 |
| 5856672 | Single-crystal silicon cantilever with integral in-plane tip for use in atomic force microscope system | — | 1999-01-05 | $44,477,000 |
| 5729026 | Atomic force microscope system with angled cantilever having integral in-plane tip | Harry Jonathon Mamin, Daniel Rugar, Bruce David Terris | 1998-03-17 | $18,535,000 |