| 9863781 |
Self-test for yaw rate sensors |
Wolfram Bauer, Johannes Classen, Rainer Willig, Matthias Meier, Burkhard Kuhlmann +5 more |
2018-01-09 |
| 9689676 |
Yaw-rate sensor |
Reinhard Neul, Johannes Classen, Torsten Ohms, Burkhard Kuhlmann, Axel Franke +4 more |
2017-06-27 |
| 9593948 |
Yaw-rate sensor |
Reinhard Neul, Johannes Classen, Torsten Ohms, Burkhard Kuhlmann, Axel Franke +4 more |
2017-03-14 |
| 9593949 |
Yaw-rate sensor |
Reinhard Neul, Johannes Classen, Torsten Ohms, Burkhard Kuhlmann, Axel Franke +4 more |
2017-03-14 |
| 9261363 |
Yaw rate sensor |
Reinhard Neul, Johannes Classen, Axel Franke, Marco Quander, Joerg Hauer +1 more |
2016-02-16 |
| 9081027 |
Yaw-rate sensor |
Reinhard Neul, Johannes Classen, Torsten Ohms, Burkhard Kuhlmann, Axel Franke +4 more |
2015-07-14 |
| 8910518 |
Self-test for yaw rate sensors |
Wolfram Bauer, Johannes Classen, Rainer Willig, Matthias Meier, Burkhard Kuhlmann +5 more |
2014-12-16 |
| 8786419 |
Method for controlling a device and a device for controlling the device |
Markus Ulm, Mathias Reimann, Harald Emmerich, Emma Abel |
2014-07-22 |
| 8468886 |
Yaw rate sensor and method for operating a yaw rate sensor |
Carsten Geckeler, Thorsten Balslink |
2013-06-25 |
| 8245571 |
Component and production method for a component |
Thorsten Pannek, Horst Muenzel |
2012-08-21 |
| 7825840 |
Delta sigma modulator |
Rainer Willig, Burkhard Kuhlmann, Wolfram Bauer, Reinhard Neul, Christoph Lang +1 more |
2010-11-02 |
| 7786738 |
Cancelling low frequency errors in MEMS systems |
Christoph Lang, Vladimir Petkov |
2010-08-31 |
| 7591179 |
Micromechanical motion sensor |
Dietmar Krieg, Reinhard Neul |
2009-09-22 |
| 7531229 |
Microstructured component and method for its manufacture |
Franz Laermer |
2009-05-12 |
| 7523663 |
Micromechanical rotation rate sensor having error suppression |
Rainer Willig, Buckhard Kuhlmann, Wolfram Bauer, Johannes Classen, Christoph Lang +1 more |
2009-04-28 |
| 7316161 |
Rotation rate sensor |
Rainer Willig, Jochen Franz, Burkhard Kuhlmann, Joerg Hauer, Dieter Maurer +7 more |
2008-01-08 |
| 7313958 |
Rotational rate sensor |
Rainer Willig, Jochen Franz, Burkhard Kuhlmann, Joerg Hauer, Dieter Maurer +7 more |
2008-01-01 |
| 7287427 |
Rate-of-rotation sensor having frequency adjustment |
Rainer Willig, Burkhard Kuhlmann, Wolfram Bauer, Christoph Lang |
2007-10-30 |
| 7134337 |
Micromechanical rotational rate sensor |
Rainer Willig, Andreas Thomae, Burkhard Kuhlmann, Joerg Hauer, Siegbert Goetz +9 more |
2006-11-14 |
| 7057248 |
Semiconductor component, particularly a micromechanical pressure sensor |
Helmut Sautter, Frank Schatz, Juergen Graf, Hans Artmann, Kersten Kehr |
2006-06-06 |
| 6752017 |
Rotation speed sensor |
Rainer Willig, Andreas Thomae, Burkhard Kuhlmann, Joerg Hauer, Siegbert Goetz +9 more |
2004-06-22 |
| 6705164 |
Rotation rate sensor |
Rainer Willig, Andreas Thomae, Burkhard Kuhlmann, Joerg Hauer, Siegbert Goetz +9 more |
2004-03-16 |
| 6691571 |
Rotational speed sensor |
Rainer Willig, Andreas Thomae, Burkhard Kuhlmann, Joerg Hauer, Siegbert Goetz +9 more |
2004-02-17 |
