Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8245571 | Component and production method for a component | Thorsten Pannek, Udo-Martin Gomez | 2012-08-21 |
| 7394349 | Device and method to detect presence in a motor vehicle | Jiri Marek, Michael Arndt | 2008-07-01 |
| 6656368 | Nonstick layer for a micromechanical component | Martin Schoefthaler, Peter Hein, Helmut Skapa | 2003-12-02 |
| 6465854 | Micromechanical component | Helmut Baumann, Eckhard Graf | 2002-10-15 |
| 6318175 | Micromechanical sensor and method for the manufacture thereof | Joerg Muchow, Michael Offenberg, Winfried Waldvogel | 2001-11-20 |
| 6268232 | Method for fabricating a micromechanical component | Helmut Skapa, Franz Laermer, Michael Offenberg, Heinz-Georg Vossenberg | 2001-07-31 |
| 6214243 | Process for producing a speed of rotation coriolis sensor | Franz Laermer, Michael Offenberg, Andrea Schilp, Markus Lutz | 2001-04-10 |
| 6140709 | Bonding pad structure and method for manufacturing the bonding pad structure | Michael Offenberg, Udo Bischof, Eckhard Graf, Markus Lutz | 2000-10-31 |
| 6117701 | Method for manufacturing a rate-of-rotation sensor | Nicholas Ian Buchan, Franz Laermer, Michael Offenberg, Udo Bischof, Markus Lutz | 2000-09-12 |
| 6106735 | Wafer stack and method of producing sensors | Jurgen Kurle, Kurt Weiblen, Stefan Pinter, Helmut Baumann, Dietrich Schubert +2 more | 2000-08-22 |
| 6076404 | Micromechanical sensor including a single-crystal silicon support | Joerg Muchow, Michael Offenberg, Winfried Waldvogel | 2000-06-20 |
| 6055858 | Acceleration sensor | Dietrich Schubert, Alexandra Boehringer, Michael Offenberg, Klaus Heyers, Markus Lutz | 2000-05-02 |
| 5959208 | Acceleration sensor | Dietrich Schubert, Alexandra Boehringer, Michael Offenberg, Klaus Heyers, Markus Lutz | 1999-09-28 |
| 5723353 | Process for manufacturing a sensor | Dietrich Schubert, Alexandra Boehringer, Michael Offenberg, Klaus Heyers, Markus Lutz | 1998-03-03 |
| 5721377 | Angular velocity sensor with built-in limit stops | Juergen Kurle, Kurt Weiblen, Helmut Baumann, Klaus Heyers, Markus Lutz | 1998-02-24 |
| 5705745 | Mass flow sensor | Christoph Treutler, Detlef Gruen, Helmut Baumann, Steffen Schmidt, Andreas Lock | 1998-01-06 |
| 5703287 | Measuring element for a flow sensor | Christoph Treutler, Rolf Benz, Steffen Schmidt, Eckart Reihlen, Andreas Lock | 1997-12-30 |
| 5629538 | Semiconductor sensor having a protective layer | Uwe Lipphardt, Guenther Findler, Helmut Baumann | 1997-05-13 |
| 5616514 | Method of fabricating a micromechanical sensor | Joerg Muchow, Michael Offenberg, Winfried Waldvogel | 1997-04-01 |
| 5616523 | Method of manufacturing sensor | Gerhard Benz, Jiri Marek, Frank Bantien, Franz Laermer, Michael Offenberg +1 more | 1997-04-01 |
| 5569852 | Capacitive accelerometer sensor and method for its manufacture | Jiri Marek, Frank Bantien, Michael Offenberg | 1996-10-29 |
| 5542558 | Method for manufacturing micro-mechanical components using selective anodization of silicon | Gerhard Benz, Jiri Marek, Martin Willmann, Frank Bantien, Franz Laermer +2 more | 1996-08-06 |
| 5507186 | Pressure sensor | Kurt Weiblen, Werner Herden, Uwe Lipphardt, Matthias Kuesell, Steffen Schmidt | 1996-04-16 |
| 5461917 | Acceleration sensor | Jiri Marek, Dietrich Schubert, Helmut Baumann, Michael Offenberg, Martin Willmann | 1995-10-31 |
| 5421952 | Method for the manufacture of silicon injection plates and silicon plates produced thereby | Juergen Buchholz, Udo Jauernig, Alexandra Boehringer, Guenther Findler | 1995-06-06 |