Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5616523 | Method of manufacturing sensor | Gerhard Benz, Jiri Marek, Horst Muenzel, Franz Laermer, Michael Offenberg +1 more | 1997-04-01 |
| 5600074 | Silicon chip for use in a force-detection sensor | Jiri Marek, Steffen Schmidt, Kurt Weiblen, Matthias Kuesell, Werner Herden | 1997-02-04 |
| 5569852 | Capacitive accelerometer sensor and method for its manufacture | Jiri Marek, Horst Muenzel, Michael Offenberg | 1996-10-29 |
| 5542558 | Method for manufacturing micro-mechanical components using selective anodization of silicon | Gerhard Benz, Jiri Marek, Martin Willmann, Horst Muenzel, Franz Laermer +2 more | 1996-08-06 |
| 5467649 | Mass flow sensor having a measuring element arranged on a membrane retained on a monocrystalline silicon wafer | Eckart Reihlen, Jiri Marek, Guenther Findler, Michael Offenberg, Josef Kleinhans +2 more | 1995-11-21 |
| 5452610 | Mass-flow sensor | Josef Kleinhans, Uwe Konzelmann, Eckart Reihlen, Botho Ziegenbein, Jiri Marek +2 more | 1995-09-26 |
| 5446437 | Temperature sensor | Eckart Reihlen | 1995-08-29 |
| 5273939 | Method of assembling micromechanical sensors | Rolf Becker, Klaus Jaeckel, Jiri Marek, Helmut Baumann, Kurt Weiblen +1 more | 1993-12-28 |
| 5261639 | Valve | Udo Jauernig, Hans-Peter Trah, Kurt Weiblen | 1993-11-16 |
| 5259247 | Sensor | — | 1993-11-09 |
| 5151763 | Acceleration and vibration sensor and method of making the same | Jiri Marek, Dietmar Haack, Martin Warth | 1992-09-29 |
| 5148604 | Micromechanical tilt sensor | — | 1992-09-22 |