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Uwe Darr, Edwin Goetz, Gerhard Voegel, Wolfgang Meinhardt |
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Assembly for diagnosing a device with moving parts |
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2012-10-16 |
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2008-01-08 |
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Process for producing a sensor membrane substrate |
Heribert Weber |
2002-04-02 |
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2001-07-10 |
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Sensor having a membrane |
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Mass flow sensor |
Christoph Treutler, Detlef Gruen, Horst Muenzel, Helmut Baumann, Andreas Lock |
1998-01-06 |
| 5703287 |
Measuring element for a flow sensor |
Christoph Treutler, Rolf Benz, Horst Muenzel, Eckart Reihlen, Andreas Lock |
1997-12-30 |
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Silicon chip for use in a force-detection sensor |
Jiri Marek, Frank Bantien, Kurt Weiblen, Matthias Kuesell, Werner Herden |
1997-02-04 |
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Pressure sensor |
Kurt Weiblen, Werner Herden, Uwe Lipphardt, Horst Muenzel, Matthias Kuesell |
1996-04-16 |
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Method of making micromechanical components |
Hans-Peter Trah, Franz Riedinger |
1993-10-19 |
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Method for manufacturing a semiconductor package including a glass support |
— |
1993-04-06 |
