Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7709933 | Structural element having a porous region at least regionally provided with a cover layer and its use as well as method for setting the thermal conductivity of a porous region | Hans Artmann, Thorsten Pannek, Franz Laermer | 2010-05-04 |
| 7321156 | Device for capacitive pressure measurement and method for manufacturing a capacitive pressure measuring device | Frank Fischer, Franz Laermer, Lars Metzger | 2008-01-22 |
| 6989609 | Method and apparatus for supplying energy to sensors | Jiri Marek, Matthias Illing, Oliver Schatz | 2006-01-24 |
| 6863438 | Microstructured thermosensor | Thorsten Pannek | 2005-03-08 |
| 6462392 | Micromechanical cap structure and the respective manufacturing method | Stefan Pinter, Harald Emmerich, Helmut Baumann | 2002-10-08 |
| 6062088 | Pressure sensor | Kurt Ingrisch, Kurt Weiblen, Hubert Benzel, Botho Ziegenbein, Andreas Duell +2 more | 2000-05-16 |
| 5595940 | Method of producing micromechanical structures | Franz Laermer, Andrea Schilp | 1997-01-21 |
| 5402937 | Perforated body and valve with perforated body | Juergen Buchholz, Martin Maier, Udo Jauernig | 1995-04-04 |
| 5375979 | Thermal micropump with values formed from silicon plates | — | 1994-12-27 |
| 5344117 | Micro-actuator | Gottfried Flik | 1994-09-06 |
| 5286341 | Process for producing micro-mechanical structures | — | 1994-02-15 |
| 5282926 | Method of anisotropically etching monocrystalline, disk-shaped wafers | Guenther Findler | 1994-02-01 |
| 5261639 | Valve | Frank Bantien, Udo Jauernig, Kurt Weiblen | 1993-11-16 |
| 5254209 | Method of making micromechanical components | Steffen Schmidt, Franz Riedinger | 1993-10-19 |
| 5244154 | Perforated plate and fuel injection valve having a performated plate | Juergen Buchholz, Martin Maier, Jiri Marek | 1993-09-14 |
| 5242533 | Method of structuring a semiconductor chip | Guenther Findler, Joerg Muchow | 1993-09-07 |
| 5216273 | Microvalve of multilayer silicon construction | Christian Doering, Thomas Grauer, Michael Mettner, Armin Schuelke, Jiri Marek +2 more | 1993-06-01 |
| 5215244 | Method of mounting silicon wafers on metallic mounting surfaces | Juergen Buchholz, Wolfgang Klucken | 1993-06-01 |