Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8900906 | Atomic layer deposition strengthening members and method of manufacture | Gary Yama, Fabian Purkl, Matthieu Liger | 2014-12-02 |
| 8492850 | Method for producing a silicon substrate having modified surface properties and a silicon substrate of said type | Gerhard Lammel, Hubert Benzel, Franz Laermer, Silvia Kronmueller, Paul Farber +4 more | 2013-07-23 |
| 8405210 | Method for producing a plurality of chips and a chip produced accordingly | Torsten Kramer, Matthias Boehringer, Stefan Pinter, Hubert Benzel, Frieder Haag +1 more | 2013-03-26 |
| 8389327 | Method for manufacturing chips | Torsten Kramer, Matthias Boehringer, Stefan Pinter, Hubert Benzel, Frieder Haag +1 more | 2013-03-05 |
| 8317882 | Method of manufacturing a planar electrode with large surface area | Po-Jui Chen, Gary Yama, Matthieu Liger | 2012-11-27 |
| 8148234 | Method for manufacturing a semiconductor structure, and a corresponding Semiconductor Structure | Gerhard Lammel, Hubert Benzel, Franz Laermer, Silvia Kronmueller, Paul Farber +4 more | 2012-04-03 |
| 7863072 | Micromechanical diaphragm sensor having a double diaphragm | Heribert Weber, Christoph Schelling, Heiko Stahl, Stefan Weiss | 2011-01-04 |
| 7572661 | Method for manufacturing a micromechanical sensor element | Hubert Benzel, Stefan Finkbeiner, Frank Schaefer, Simon Armbruster, Gerhard Lammel +2 more | 2009-08-11 |
| 7354786 | Sensor element with trenched cavity | Hubert Benzel, Stefan Finkbeiner, Frank Schaefer, Simon Armbruster, Gerhard Lammel +2 more | 2008-04-08 |
| 6989609 | Method and apparatus for supplying energy to sensors | Jiri Marek, Hans-Peter Trah, Oliver Schatz | 2006-01-24 |
| 6739193 | Micromechanical structure, in particular for an acceleration sensor or yaw rate sensor and a corresponding method for producing the same | Jochen Franz, Frank Henning, Frank Fischer, Peter Hein | 2004-05-25 |
| 6360605 | Micromechanical device | Stefan Pinter, Martin Schoefthaler, Ralf Schellin, Helmut Baumann, Michael Fehrenbach +2 more | 2002-03-26 |