Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8687255 | Method for manufacturing a micromechanical component, and micromechanical component | Tjalf Pirk, Christoph Friese | 2014-04-01 |
| 8198130 | Chip module and method for producing a chip module having plains of extensions for chip and substrate | Frieder Haag, Hans-Peter Baer | 2012-06-12 |
| 7740459 | Micropump having a pump diaphragm and a polysilicon layer | Matthias Fuertsch, Hubert Benzel, Stefan Pinter, Frank Fischer, Heiko Stahl +1 more | 2010-06-22 |
| 7572660 | Electrical through-plating of semiconductor chips | Hubert Benzel, Christoph Schelling, Julian Gonska | 2009-08-11 |
| 7572661 | Method for manufacturing a micromechanical sensor element | Hubert Benzel, Matthias Illing, Frank Schaefer, Simon Armbruster, Gerhard Lammel +2 more | 2009-08-11 |
| 7354786 | Sensor element with trenched cavity | Hubert Benzel, Matthias Illing, Frank Schaefer, Simon Armbruster, Gerhard Lammel +2 more | 2008-04-08 |
| 6511913 | Method for manufacturing a membrane | Hubert Benzel | 2003-01-28 |