Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5629538 | Semiconductor sensor having a protective layer | Uwe Lipphardt, Horst Muenzel, Helmut Baumann | 1997-05-13 |
| 5553789 | Orifice element | Juergen Buchholz, Udo Jauernig | 1996-09-10 |
| 5553790 | Orifice element and valve with orifice element | Juergen Buchholz, Udo Jauernig | 1996-09-10 |
| 5467649 | Mass flow sensor having a measuring element arranged on a membrane retained on a monocrystalline silicon wafer | Eckart Reihlen, Jiri Marek, Frank Bantien, Michael Offenberg, Josef Kleinhans +2 more | 1995-11-21 |
| 5452610 | Mass-flow sensor | Josef Kleinhans, Uwe Konzelmann, Eckart Reihlen, Botho Ziegenbein, Jiri Marek +2 more | 1995-09-26 |
| 5431052 | Capacitive sensor | Richard Bischof | 1995-07-11 |
| 5421952 | Method for the manufacture of silicon injection plates and silicon plates produced thereby | Juergen Buchholz, Udo Jauernig, Alexandra Boehringer, Horst Muenzel | 1995-06-06 |
| 5355569 | Method of making sensor | Jiri Marek, Helmut Baumann, Michael Offenberg, Martin Willmann | 1994-10-18 |
| 5324410 | Device for one-sided etching of a semiconductor wafer | Nils Kummer, Jiri Marek, Martin Willmann | 1994-06-28 |
| 5282926 | Method of anisotropically etching monocrystalline, disk-shaped wafers | Hans-Peter Trah | 1994-02-01 |
| 5242533 | Method of structuring a semiconductor chip | Hans-Peter Trah, Joerg Muchow | 1993-09-07 |
| 5071510 | Process for anisotropic etching of silicon plates | Horst Muenzel | 1991-12-10 |