Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6663784 | Method for producing three-dimensional structures by means of an etching process | Roland Mueller-Fiedler, Klaus Breitschwerdt, Andre Mueller, Frauke Driewer, Andreas Kern | 2003-12-16 |
| 5324410 | Device for one-sided etching of a semiconductor wafer | Jiri Marek, Martin Willmann, Guenther Findler | 1994-06-28 |