Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11396891 | Compressor | Harald Passrucker, Bjoern Grueber, Thorsten Poehler | 2022-07-26 |
| 7785486 | Method of etching structures into an etching body using a plasma | Andrea Urban, Franz Laermer, Volker Becker | 2010-08-31 |
| 7642545 | Layer and system with a silicon layer and a passivation layer, method for production of a passivation layer on a silicon layer and use thereof | Andrea Urban, Franz Laermer | 2010-01-05 |
| 7288485 | Device and method for anisotropic plasma etching of a substrate, particularly a silicon element | Bernd Kutsch, Franz Laermer | 2007-10-30 |
| 7285228 | Device and method for anisotropic plasma etching of a substrate, a silicon body in particular | Franz Laermer, Bernd Kutsch | 2007-10-23 |
| 7149070 | Holding device, in particular for fixing a semiconductor wafer in a plasma etching device, and method for supplying heat to or dissipating heat from a substrate | Franz Laermer, Andrea Urban | 2006-12-12 |
| 7094706 | Device and method for etching a substrate by using an inductively coupled plasma | Volker Becker, Franz Laermer, Andrea Schilp | 2006-08-22 |
| 6974709 | Method and device for providing a semiconductor etching end point and for detecting the end point | Franz Laermer | 2005-12-13 |
| 6709546 | Device and method for etching a substrate by using an inductively coupled plasma | Volker Becker, Franz Laermer, Andrea Schilp | 2004-03-23 |
| 6663784 | Method for producing three-dimensional structures by means of an etching process | Nils Kummer, Roland Mueller-Fiedler, Andre Mueller, Frauke Driewer, Andreas Kern | 2003-12-16 |
| 6431830 | Nozzle ring for a gas turbine | Karl-Hermann Richter, Josef Reischl, Hans-Juergen Schmuhl, Ulrich Knott, Siegfried Boettcher +2 more | 2002-08-13 |
| 6119339 | Nozzle ring for a gas turbine and method of manufacture thereof | Karl-Hermann Richter, Josef Reischl, Hans-Juergen Schmuhl, Ulrich Knott, Siegfried Boettcher +2 more | 2000-09-19 |