Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7270011 | Combined absolute-pressure and relative-pressure sensor | — | 2007-09-18 |
| 6790699 | Method for manufacturing a semiconductor device | Wilhelm Frey | 2004-09-14 |
| 6395574 | Micromechanical component and appropriate manufacturing method | Hubert Benzel, Frank Schaefer | 2002-05-28 |
| 6272926 | Micromechanical component | Michael Fehrenbach, Dietrich Schubert | 2001-08-14 |
| 6268232 | Method for fabricating a micromechanical component | Helmut Skapa, Horst Muenzel, Franz Laermer, Michael Offenberg | 2001-07-31 |
| 5937275 | Method of producing acceleration sensors | Horst Munzel, Michael Offenberg, Klaus Heyers, Bernhard Elsner, Markus Lutz +3 more | 1999-08-10 |