Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6318175 | Micromechanical sensor and method for the manufacture thereof | Joerg Muchow, Horst Muenzel, Michael Offenberg | 2001-11-20 |
| 6076404 | Micromechanical sensor including a single-crystal silicon support | Joerg Muchow, Horst Muenzel, Michael Offenberg | 2000-06-20 |
| 5616514 | Method of fabricating a micromechanical sensor | Joerg Muchow, Horst Muenzel, Michael Offenberg | 1997-04-01 |