| 8304845 |
Method for sealing an opening |
Holger Hoefer, Volker Schmitz, Axel Grosse, Lutz Mueller, Ralf Hausner |
2012-11-06 |
| 7316161 |
Rotation rate sensor |
Rainer Willig, Jochen Franz, Burkhard Kuhlmann, Joerg Hauer, Udo-Martin Gomez +7 more |
2008-01-08 |
| 7313958 |
Rotational rate sensor |
Rainer Willig, Jochen Franz, Burkhard Kuhlmann, Joerg Hauer, Udo-Martin Gomez +7 more |
2008-01-01 |
| 7270868 |
Micromechanical component |
Thorsten Pannek, Silvia Kronmueller, Jens Frey, Ulf Wilhelm |
2007-09-18 |
| 7134337 |
Micromechanical rotational rate sensor |
Rainer Willig, Andreas Thomae, Burkhard Kuhlmann, Joerg Hauer, Udo-Martin Gomez +9 more |
2006-11-14 |
| 6905615 |
Method of manufacturing a micromechanical component |
Frank Fischer, Wilhelm Frey, Lars Metzger |
2005-06-14 |
| 6752017 |
Rotation speed sensor |
Rainer Willig, Andreas Thomae, Burkhard Kuhlmann, Joerg Hauer, Udo-Martin Gomez +9 more |
2004-06-22 |
| 6705164 |
Rotation rate sensor |
Rainer Willig, Andreas Thomae, Burkhard Kuhlmann, Joerg Hauer, Udo-Martin Gomez +9 more |
2004-03-16 |
| 6691571 |
Rotational speed sensor |
Rainer Willig, Andreas Thomae, Burkhard Kuhlmann, Joerg Hauer, Udo-Martin Gomez +9 more |
2004-02-17 |
| 6368885 |
Method for manufacturing a micromechanical component |
Michael Offenberg |
2002-04-09 |
| 6187607 |
Manufacturing method for micromechanical component |
Michael Offenberg, Markus Lutz |
2001-02-13 |
| 6140709 |
Bonding pad structure and method for manufacturing the bonding pad structure |
Horst Muenzel, Michael Offenberg, Eckhard Graf, Markus Lutz |
2000-10-31 |
| 6117701 |
Method for manufacturing a rate-of-rotation sensor |
Nicholas Ian Buchan, Horst Muenzel, Franz Laermer, Michael Offenberg, Markus Lutz |
2000-09-12 |
