Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10336610 | Method for producing a micromechanical component | Heiko Stahl, Andreas Scheurle, Hendrik Specht, Marlene Winker, Volker Schmitz | 2019-07-02 |
| 9935077 | Apparatus for eutectic bonding | Andreas Duell, Johannes Baader, Rainer Straub | 2018-04-03 |
| 8530260 | Method for attaching a first carrier device to a second carrier device and micromechanical components | Julian Gonska, Axel Grosse, Heribert Weber | 2013-09-10 |
| 8304845 | Method for sealing an opening | Udo Bischof, Holger Hoefer, Volker Schmitz, Axel Grosse, Lutz Mueller | 2012-11-06 |
| 8035209 | Micromechanical device which has cavities having different internal atmospheric pressures | Julian Gonska | 2011-10-11 |
| 7705413 | Micromechanical component and method for producing a micromechanical component | Heribert Weber | 2010-04-27 |
| 6955975 | Method for joining a silicon plate to a second plate | Frank Reichenbach, Frank Fischer, Frieder Haag, Eckhard Graf, Markus Lutz | 2005-10-18 |