Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7273764 | Sensor with at least one micromechanical structure, and method for producing it | Frank Reichenbach, Stefan Pinter, Frank Henning, Hans Artmann, Helmut Baumann +2 more | 2007-09-25 |
| 6936902 | Sensor with at least one micromechanical structure and method for production thereof | Frank Reichenbach, Stefan Pinter, Frank Henning, Hans Artmann, Helmut Baumann +2 more | 2005-08-30 |