Issued Patents All Time
Showing 51–59 of 59 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6936902 | Sensor with at least one micromechanical structure and method for production thereof | Frank Reichenbach, Frank Henning, Hans Artmann, Helmut Baumann, Franz Laemer +2 more | 2005-08-30 |
| 6782749 | Micromechanical component | — | 2004-08-31 |
| 6778400 | Electronic device | Juergen Kurle, Kurt Weiblen, Frieder Haag | 2004-08-17 |
| 6620735 | Method for processing substrates | Holger Hoefer | 2003-09-16 |
| 6528868 | Lead frame device and method for producing the same | Kurt Weiblen, Frieder Haag | 2003-03-04 |
| 6462392 | Micromechanical cap structure and the respective manufacturing method | Harald Emmerich, Hans-Peter Trah, Helmut Baumann | 2002-10-08 |
| 6360605 | Micromechanical device | Martin Schoefthaler, Matthias Illing, Ralf Schellin, Helmut Baumann, Michael Fehrenbach +2 more | 2002-03-26 |
| 6106735 | Wafer stack and method of producing sensors | Jurgen Kurle, Kurt Weiblen, Horst Muenzel, Helmut Baumann, Dietrich Schubert +2 more | 2000-08-22 |
| 5872309 | Method for checking the sealing of a package and apparatus for measuring viscosity | — | 1999-02-16 |