Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10473683 | Sensor element for thermal anemometry | Christian Lemier, Torsten Kramer | 2019-11-12 |
| 9758369 | Method for manufacturing a microphone structure and a pressure sensor structure in the layer structure of a MEMS element | Bernhard Gehl | 2017-09-12 |
| 9266719 | Methods of manufacture MEMS devices | Wolfgang Raberg, Bernhard Winkler, Werner Weber | 2016-02-23 |
| 9083308 | MEMS device | Mohsin Nawaz, Mihail Sararoiu | 2015-07-14 |
| 9035307 | Microphone component | Bernhard Gehl, Thomas Buck | 2015-05-19 |
| 8742873 | MEMS resonator devices | Bernhard Winkler, Mohsin Nawaz | 2014-06-03 |
| 8703516 | MEMS substrates, devices, and methods of manufacture thereof | — | 2014-04-22 |
| 8476990 | MEMS resonator devices | Bernhard Winkler, Mohsin Nawaz | 2013-07-02 |
| 8198690 | MEMS devices and methods of manufacture thereof | Wolfgang Raberg, Bernhard Winkler, Werner Weber | 2012-06-12 |
| 8115573 | Resonance frequency tunable MEMS device | Mohsin Nawaz, Mihail Sararoiu | 2012-02-14 |
| 8049490 | Silicon MEMS resonator devices and methods | Markus Loehndorf, Wolfgang Raberg | 2011-11-01 |
| 8049515 | Silicon MEMS resonators | Markus Loehndorf | 2011-11-01 |
| 8040207 | MEMS resonator devices with a plurality of mass elements formed thereon | Bernhard Winkler, Mohsin Nawaz | 2011-10-18 |
| 7889030 | Passive temperature compensation of silicon MEMS devices | Robert Gruenberger, Mohsin Nawaz, Bernhard Winkler | 2011-02-15 |
| 7851875 | MEMS devices and methods of manufacture thereof | Wolfgang Raberg, Bernhard Winkler, Werner Weber | 2010-12-14 |
| 7851925 | Wafer level packaged MEMS integrated circuit | Horst Theuss, Markus Loehndorf | 2010-12-14 |
| 7755367 | Silicon MEMS resonators | Markus Loehndorf | 2010-07-13 |