| 8492855 |
Micromechanical capacitive pressure transducer and production method |
Gerhard Lammel, Hubert Benzel, Simon Armbruster, Christoph Schelling |
2013-07-23 |
| 7843025 |
Micromechanical semiconductor sensor |
Hubert Benzel, Frank Schaefer, Simon Armbruster, Gerhard Lammel, Christoph Schelling |
2010-11-30 |
| 7755152 |
Semiconductor component configured as a diaphragm sensor |
Hubert Benzel, Frank Schaefer, Simon Armbruster, Gerhard Lammel, Christoph Schelling |
2010-07-13 |
| 7572661 |
Method for manufacturing a micromechanical sensor element |
Hubert Benzel, Stefan Finkbeiner, Matthias Illing, Frank Schaefer, Simon Armbruster +2 more |
2009-08-11 |
| 7569412 |
Method for manufacturing a diaphragm sensor |
Hubert Benzel, Frank Schaefer, Simon Armbruster, Gerhard Lammel, Christoph Schelling |
2009-08-04 |
| 7494839 |
Method for manufacturing a membrane sensor |
Hubert Benzel, Frank Schaefer, Simon Armbruster, Gerhard Lammel, Christoph Schelling |
2009-02-24 |
| 7354786 |
Sensor element with trenched cavity |
Hubert Benzel, Stefan Finkbeiner, Matthias Illing, Frank Schaefer, Simon Armbruster +2 more |
2008-04-08 |
