Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11623860 | Interposer substrate, MEMS device and corresponding manufacturing method | Corinna Koepernik, Joerg Muchow, Rainer Straub | 2023-04-11 |
| 11099261 | Scanning device | Stephen Schmitt, Siegwart Bogatscher, Ulrike Schloeder, Thorsten Balslink, Hans-Jochen Schwarz +1 more | 2021-08-24 |
| 10866407 | Micromechanical component and method for producing a micromechanical component | Daniel Maier, Joerg Muchow, Corinna Koepernik, Helmut Grutzeck, Rainer Straub +1 more | 2020-12-15 |
| 10488650 | Micromechanical component and method for adjusting an adjustable part simultaneously about two axes of rotation inclined in relation to one another | Helmut Grutzeck, Joerg Muchow, Mirko Hattass, Thorsten Balslink, Frank Schatz | 2019-11-26 |
| 10222609 | Micromirror arrangement and projection device | Rainer Straub, Stefan Pinter, Johannes Baader, Andreas Duell, Frederic Njikam Njimonzie +2 more | 2019-03-05 |