Issued Patents All Time
Showing 51–55 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6204086 | Method for manufacturing semiconductor components having micromechanical structures | Helmut Baumann | 2001-03-20 |
| 6076404 | Micromechanical sensor including a single-crystal silicon support | Horst Muenzel, Michael Offenberg, Winfried Waldvogel | 2000-06-20 |
| 5616514 | Method of fabricating a micromechanical sensor | Horst Muenzel, Michael Offenberg, Winfried Waldvogel | 1997-04-01 |
| 5242533 | Method of structuring a semiconductor chip | Hans-Peter Trah, Guenther Findler | 1993-09-07 |
| 5216273 | Microvalve of multilayer silicon construction | Christian Doering, Thomas Grauer, Michael Mettner, Armin Schuelke, Jiri Marek +2 more | 1993-06-01 |