Issued Patents All Time
Showing 26–50 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9618740 | Micromirror and manufacturing method for at least one micromirror which is situatable or situated in a micromirror device | Simon Armbruster, Helmut Grutzeck, Frederic Njikam Njimonzie, Johannes Baader, Stefan Pinter +2 more | 2017-04-11 |
| 9593013 | Mechanical component, mechanical system, and method for operating a mechanical component | Mohamad Iyad Al Dibs, Frederic Njikam Njimonzie | 2017-03-14 |
| 9360664 | Micromechanical component and method for producing a micromechanical component | Simon Armbruster, Helmut Grutzeck, Frank Schatz, Frederic Njikam Njimonzie, Johannes Baader +2 more | 2016-06-07 |
| 9195054 | Cascaded micromechanical actuator structure | Tjalf Pirk, Stefan Pinter, Joachim Fritz, Christoph Friese | 2015-11-24 |
| 9052510 | Micromechanical component and manufacturing method for a micromechanical component | Steffi Lindenkreuz, Gerhard Kiesewetter, Stefan Pinter | 2015-06-09 |
| 9045331 | Micromechanical component and method for producing a micromechanical component | Heiko Nitsche, Stefan Pinter, Wolfram Schock, Christoph Friese | 2015-06-02 |
| 8896897 | Micromechanical component and a method for operating a micromechanical component | Stefan Pinter, Joachim Fritz, Christoph Friese | 2014-11-25 |
| 8847336 | Micromechanical component having an inclined structure and corresponding manufacturing method | Tjalf Pirk, Stefan Pinter, Hubert Benzel, Heribert Weber, Michael Krueger +5 more | 2014-09-30 |
| 8813573 | Micromechanical component and production method for a micromechanical component | Frederic Njikam Njimonzie, Wolfram Schock, Zoltan Lestyan | 2014-08-26 |
| 8581470 | Electrode comb, micromechanical component, and method for producing an electrode comb or a micromechanical component | Tjalf Pirk, Stefan Pinter, Joachim Fritz | 2013-11-12 |
| 8462414 | Micromechanical component, light-deflecting device, and manufacturing methods for a micromechanical component and a light-deflecting device | Reinhold Fiess | 2013-06-11 |
| 8462415 | Connecting structure for micromechanical oscillating devices | Stefan Pinter, Andreas Duell, Zoltan Lestyan | 2013-06-11 |
| 8344831 | Magnetic yoke, micromechanical component and method for producing a magnetic yoke and a micromechanical component | Stefan Pinter, Juergen Kober | 2013-01-01 |
| 8248225 | Tire sensor module and method for its manufacture | Thomas Buck, Thorsten Pannek, Ulrike Scholz, Gustav Klett, Sonja Knies | 2012-08-21 |
| 8188634 | Electrostatic drive, method for operating a micromechanical component having an electrostatic drive, and method for manufacturing an electrostatic drive | Michael Krueger, Frederic Njikam Njimonzie | 2012-05-29 |
| 7918136 | Micromechanical sensor element | Hubert Benzel, Simon Armbruster, Christoph Schelling | 2011-04-05 |
| 7667282 | Micromechanical component and method for manufacturing such a component | Torsten Ohms, Volkmar Senz, Guenther-Nino-Carlo Ullrich, Ronald Gampp | 2010-02-23 |
| 7647832 | Micromechanical device and method for producing a micromechanical device | Hubert Benzel, Markus Lang, Regina Grote, Simon Armbruster, Gerhard Lammel +2 more | 2010-01-19 |
| 7343806 | Pressure sensor featuring pressure loading of the fastening element | Hubert Benzel, Heribert Weber, Frank Schaefer | 2008-03-18 |
| 7279759 | Membrane sensor | Roland Muller-Fiedler, Hans Hecht, Matthias Fuertsch, Andreas Stratmann, Heribert Weber +6 more | 2007-10-09 |
| 7252008 | Micromechanical piezoresistive pressure sensor device | Hubert Benzel | 2007-08-07 |
| 7055392 | Micromechanical pressure sensor | Hubert Benzel, Roland Guenschel | 2006-06-06 |
| 6782756 | Micromechanical component and equalization method | Jochen Franz, Uwe Lipphardt, Andreas Duell, Wolfgang Romes | 2004-08-31 |
| 6559661 | Circuit configuration for compensating the temperature non-linearity of the characteristic curves of the piezoresistive measuring resistors connected in a bridge circuit | Joachim Horn, Oliver Schatz | 2003-05-06 |
| 6318175 | Micromechanical sensor and method for the manufacture thereof | Horst Muenzel, Michael Offenberg, Winfried Waldvogel | 2001-11-20 |