Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10466197 | Component part having a MECS component on a mounting carrier | Harald Guenschel, Lothar Diehl, Gerhard Schneider | 2019-11-05 |
| 7872487 | Semiconductor wafer having a multitude of sensor elements and method for measuring sensor elements on a semiconductor wafer | Holger Ross, Hubert Benzel, Harald Guenschel | 2011-01-18 |
| 7493819 | Micromechanical pressure sensor system | Hubert Benzel | 2009-02-24 |
| 7093493 | Pressure sensor having a silicon chip on a steel diaphragm | Hubert Benzel, Masoud Habibi, Gilbert Moersch, Jan Gebauer | 2006-08-22 |
| 7055392 | Micromechanical pressure sensor | Joerg Muchow, Hubert Benzel | 2006-06-06 |