Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7843025 | Micromechanical semiconductor sensor | Hubert Benzel, Frank Schaefer, Gerhard Lammel, Christoph Schelling, Joerg Brasas | 2010-11-30 |
| 7755152 | Semiconductor component configured as a diaphragm sensor | Hubert Benzel, Frank Schaefer, Gerhard Lammel, Christoph Schelling, Joerg Brasas | 2010-07-13 |
| 7647832 | Micromechanical device and method for producing a micromechanical device | Joerg Muchow, Hubert Benzel, Markus Lang, Regina Grote, Gerhard Lammel +2 more | 2010-01-19 |
| 7572661 | Method for manufacturing a micromechanical sensor element | Hubert Benzel, Stefan Finkbeiner, Matthias Illing, Frank Schaefer, Gerhard Lammel +2 more | 2009-08-11 |
| 7569412 | Method for manufacturing a diaphragm sensor | Hubert Benzel, Frank Schaefer, Gerhard Lammel, Christoph Schelling, Joerg Brasas | 2009-08-04 |
| 7494839 | Method for manufacturing a membrane sensor | Hubert Benzel, Frank Schaefer, Gerhard Lammel, Christoph Schelling, Joerg Brasas | 2009-02-24 |
| 7404332 | Micromechanical component and method | Gerhard Lammel, Frank Schaefer, Hubert Benzel | 2008-07-29 |
| 7354786 | Sensor element with trenched cavity | Hubert Benzel, Stefan Finkbeiner, Matthias Illing, Frank Schaefer, Gerhard Lammel +2 more | 2008-04-08 |