Issued Patents All Time
Showing 25 most recent of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12241743 | Sensor system and method for securing a sensor system | Alexander Tsapkolenko, Hartmut Ruf, Mirko Hofmann | 2025-03-04 |
| 11988511 | Micromechanical component for a rotation rate sensor and corresponding manufacturing method | Matthias Kuehnel, Nils Felix Kuhlmann, Robert Maul, Steffen Markisch, Thorsten Balslink +1 more | 2024-05-21 |
| 11874291 | Method for temperature compensation of a microelectromechanical sensor, and microelectromechanical sensor | Amin Jemili, Jochen Reinmuth, Dusan Radovic, Steffen Becker | 2024-01-16 |
| 11860184 | Micromechanical structure and micromechanical sensor | Cristian Nagel, Johannes Classen, Lars Tebje, Rudy Eid | 2024-01-02 |
| 11719539 | Micromechanical component for a yaw rate sensor and corresponding production method | Matthias Kuehnel, Nils Felix Kuhlmann, Robert Maul, Steffen Markisch, Thorsten Balslink +1 more | 2023-08-08 |
| 11697583 | Micromechanical device including a stop spring structure | Cristian Nagel, Johannes Classen, Rudy Eid | 2023-07-11 |
| 11485630 | Micromechanical sensor | Jan Waldmann, Rudy Eid | 2022-11-01 |
| 10794928 | Microelectromechanical component | Benny Pekka Herzogenrath, Denis Gugel, Rudy Eid | 2020-10-06 |
| 10753742 | Micromechanical yaw rate sensor and method for operating same | Reinhard Neul, Torsten Ohms, Robert Maul, Mirko Hattass, Christian Hoeppner +3 more | 2020-08-25 |
| 10753743 | Micromechanical yaw rate sensor and method for the production thereof | Reinhard Neul, Torsten Ohms, Robert Maul, Mirko Hattass, Christian Hoeppner +3 more | 2020-08-25 |
| 10260879 | Sensor device and method for operating a sensor device having at least one seismic mass | Robert Maul, Mirko Hattass | 2019-04-16 |
| 10035696 | MEMS component including a diaphragm element which is attached via a spring structure to the component layer structure | Fabian Purkl, Michael Stumber, Ricardo Ehrenpfordt, Benedikt Stein, Christoph Schelling | 2018-07-31 |
| 9998828 | MEMS microphone element | — | 2018-06-12 |
| 9945669 | Rotation rate sensor and a method for operating a rotation rate sensor | Thorsten Balslink, Benjamin Schmidt, Ralf Ameling, Mirko Hattass, Burkhard Kuhlmann +1 more | 2018-04-17 |
| 9936298 | MEMS component including a sound-pressure-sensitive diaphragm element and piezosensitive signal detection | Thomas Buck, Fabian Purkl, Michael Stumber, Ricardo Ehrenpfordt, Benedikt Stein +1 more | 2018-04-03 |
| 9914636 | MEMS component including a sound-pressure-sensitive diaphragm element | Thomas Buck, Fabian Purkl, Michael Stumber, Benedikt Stein, Christoph Schelling | 2018-03-13 |
| 9823073 | Rotation-rate sensor having a substrate having a main extension plane for detecting a rotation rate | Thorsten Balslink, Benjamin Schmidt, Ralf Ameling, Mirko Hattass, Burkhard Kuhlmann +1 more | 2017-11-21 |
| 9725300 | Capacitive MEMS-sensor element having bond pads for the electrical contacting of the measuring capacitor electrodes | Heiko Stahl, Arnim Hoechst, Bernhard Gehl, Benedikt Stein | 2017-08-08 |
| 9651375 | Yaw-rate sensor with a compensating mass | Burkhard Kuhlmann, Daniel Christoph Meisel, Benjamin Schmidt, Thorsten Balslink | 2017-05-16 |
| 9621996 | Micromechanical sound transducer system and a corresponding manufacturing method | Christoph Schelling, Michael Stumber, Benedikt Stein, Theresa Lutz | 2017-04-11 |
| 9571938 | Microphone element and device for detecting acoustic and ultrasound signals | Christoph Schelling, Ricardo Ehrenpfordt | 2017-02-14 |
| 9516423 | Membrane arrangement for a microelectromechanical measuring transducer and method for producing a membrane arrangement | Mike Daley, Christoph Schelling | 2016-12-06 |
| 9516424 | Micromechanical sensor system combination and a corresponding manufacturing method | Christoph Schelling, Ricardo Ehrenpfordt | 2016-12-06 |
| 9369809 | MEMS component for generating pressure pulses | Jochen Zoellin, Ricardo Ehrenpfordt | 2016-06-14 |
| 9277329 | Capacitive MEMS element including a pressure-sensitive diaphragm | Christoph Schelling, Ricardo Ehrenpfordt | 2016-03-01 |