Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12146763 | Inertial sensor and computer-implemented method for self-calibration of an inertial sensor | Wenqing Liu | 2024-11-19 |
| 11988511 | Micromechanical component for a rotation rate sensor and corresponding manufacturing method | Nils Felix Kuhlmann, Robert Maul, Rolf Scheben, Steffen Markisch, Thorsten Balslink +1 more | 2024-05-21 |
| 11953323 | Micromechanical rate-of-rotation sensor set-up, rate-of-rotation sensor array and corresponding manufacturing method | Reinhard Neul, Andreas Lassl, Burkhard Kuhlmann, Jan-Timo Liewald, Niels Bode +3 more | 2024-04-09 |
| 11719539 | Micromechanical component for a yaw rate sensor and corresponding production method | Nils Felix Kuhlmann, Robert Maul, Rolf Scheben, Steffen Markisch, Thorsten Balslink +1 more | 2023-08-08 |
| 11466985 | Rotation-rate sensor, method for producing a rotation-rate sensor | Jan-Timo Liewald, Andreas Lassl, Burkhard Kuhlmann, Niels Bode, Nils Felix Kuhlmann +3 more | 2022-10-11 |
| 11421991 | Yaw-rate sensor with a substrate having a main extension plane, method for manufacturing a yaw-rate sensor | Andreas Lassl, Burkhard Kuhlmann, Jan-Timo Liewald, Niels Bode, Nils Felix Kuhlmann +2 more | 2022-08-23 |
| 11417552 | Method and device for determining a feature for devices produced on a wafer | Christoph Zimmer, Dusan Radovic, Eric Sebastian Schmidt, Michael Herman, Wenqing Liu +1 more | 2022-08-16 |
| 11365969 | MEMS device including spurious mode suppression and corresponding operating method | Andreas Lassl, Niels Bode, Nils Felix Kuhlmann, Peter Degenfeld-Schonburg, Reinhard Neul +1 more | 2022-06-21 |
| 11226202 | Three-axis micromechanical rotation rate sensor system including linearly and rotatorily drivable sensor units | Odd-Axel Pruetz, Andreas Lassi, Burkhard Kuhlmann, Jan-Timo Liewald, Niels Bode +3 more | 2022-01-18 |
| 10913652 | Micromechanical z-inertial sensor | Jochen Reinmuth | 2021-02-09 |
| 10900785 | Micromechanical rotational rate sensor system and corresponding production method | Niels Bode, Andreas Lassi, Burkhard Kuhlmann, Jan-Timo Liewald, Nils Felix Kuhlmann +3 more | 2021-01-26 |