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Micromechanical rate-of-rotation sensor set-up, rate-of-rotation sensor array and corresponding manufacturing method |
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Rotation-rate sensor, method for producing a rotation-rate sensor |
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| 11421991 |
Yaw-rate sensor with a substrate having a main extension plane, method for manufacturing a yaw-rate sensor |
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| 11365969 |
MEMS device including spurious mode suppression and corresponding operating method |
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2022-06-21 |
| 11099013 |
One-axis and two-axis rotation rate sensor |
Peter Degenfeld-Schonburg, Burkhard Kuhlmann, Niels Bode, Nils Felix Kuhlmann, Reinhard Neul |
2021-08-24 |
| 10655965 |
Rotational speed sensor with minimized interference movements in the driving mode |
Benjamin Schmidt, Burkhard Kuhlmann, Christian Hoeppner, Mirko Hattass, Thorsten Balslink |
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| 10557710 |
Dual-axis ultra-robust rotation rate sensor for automotive applications |
Benjamin Schmidt, Burkhard Kuhlmann, Mirko Hattass, Thorsten Balslink, Christian Hoeppner |
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| 10139424 |
OMM rotation rate sensor including a drive, without stationary electrodes |
Jochen Reinmuth, Odd-Axel Pruetz |
2018-11-27 |
| 9316126 |
Method for determining a phase position of an adjustable camshaft |
Torsten Baumann, Oliver Krannich |
2016-04-19 |
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Method and device for controlling an internal combustion engine |
Lutz Reuschenbach, Oliver Krannich |
2015-02-24 |
