Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11874291 | Method for temperature compensation of a microelectromechanical sensor, and microelectromechanical sensor | Amin Jemili, Jochen Reinmuth, Rolf Scheben, Steffen Becker | 2024-01-16 |
| 11417552 | Method and device for determining a feature for devices produced on a wafer | Christoph Zimmer, Eric Sebastian Schmidt, Matthias Kuehnel, Michael Herman, Wenqing Liu +1 more | 2022-08-16 |