| 11873216 |
Method for producing damper structures on a micromechanical wafer |
— |
2024-01-16 |
| 11505455 |
Method for producing a micromechanical device having a damper structure |
Holger Hoefer, Klaus Offterdinger, Maximilian Amberger |
2022-11-22 |
| 11472698 |
Method for producing damper structures on a micromechanical wafer |
Stefan Apelt |
2022-10-18 |
| 10532162 |
Method and device for determining an injection process of an injection appliance, and injection appliance for injecting fluid |
Andreas Merz, Fabian Utermoehlen, Stefan Leidich |
2020-01-14 |
| 10035696 |
MEMS component including a diaphragm element which is attached via a spring structure to the component layer structure |
Fabian Purkl, Ricardo Ehrenpfordt, Rolf Scheben, Benedikt Stein, Christoph Schelling |
2018-07-31 |
| 10000374 |
MEMS component |
Christoph Schelling, Benedikt Stein |
2018-06-19 |
| 9936298 |
MEMS component including a sound-pressure-sensitive diaphragm element and piezosensitive signal detection |
Thomas Buck, Fabian Purkl, Ricardo Ehrenpfordt, Rolf Scheben, Benedikt Stein +1 more |
2018-04-03 |
| 9914636 |
MEMS component including a sound-pressure-sensitive diaphragm element |
Thomas Buck, Fabian Purkl, Rolf Scheben, Benedikt Stein, Christoph Schelling |
2018-03-13 |
| 9621996 |
Micromechanical sound transducer system and a corresponding manufacturing method |
Christoph Schelling, Benedikt Stein, Theresa Lutz, Rolf Scheben |
2017-04-11 |
| 9555229 |
Method for producing silicon microneedle arrays with holes and microneedle array |
— |
2017-01-31 |
| 9556476 |
Method for active hybridization in microarrays with denaturing function |
Martina Daub, Jochen Rupp |
2017-01-31 |
| 9492647 |
Microneedle array applicator and method for applying a microneedle array |
Martina Daub |
2016-11-15 |
| 9034162 |
Microfluidic cell |
Martina Daub, Jochen Rupp, Massimo Kubon, Peter Rothacher, Meike Moschallski +2 more |
2015-05-19 |
| 8986256 |
Manufacturing method for a porous microneedle array and corresponding porous microneedle array and corresponding substrate composite |
Dick Scholten, Franz Laermer, Ando Feyh |
2015-03-24 |
| 8979796 |
Applicator for treating skin |
— |
2015-03-17 |
| 8839828 |
Filling device having cooling and system for administering a liquid medication |
Dick Scholten |
2014-09-23 |
| 8607450 |
Method for manufacturing a micropump and micropump |
Julia Cassemeyer, Franz Laermer, Ralf Reichenbach |
2013-12-17 |
| 8528591 |
Micro valve, method for producing a micro valve, as well as micro pump |
Tjalf Pirk |
2013-09-10 |
| 8506530 |
Microneedles to be placed in the skin for the transdermal application of pharmaceuticals |
Franz Laermer, Dick Scholten, Christian Maeurer |
2013-08-13 |
| 8377315 |
Method for manufacturing porous microstructures, porous microstructures manufactured according to this method, and the use thereof |
Dick Scholten, Tjalf Pirk, Franz Laermer, Ralf Reichenbach, Ando Feyh |
2013-02-19 |
| 8354033 |
Method for producing porous microneedles and their use |
Dick Scholten, Julia Cassemeyer, Franz Laermer, Ando Feyh, Christian Maeurer |
2013-01-15 |
| 7377173 |
Hydrostatic pressure determination in a high-pressure a reservoir (common rail) by means of ultrasonic echo time measurement |
Gottfried Flik, Stefan Muelders, Oliver Stoll |
2008-05-27 |
| 7362105 |
Integrated microstructure sensor element for detecting thermodynamic variables of a fluid |
Heinz Eisenschmid, Carsten Raudzis |
2008-04-22 |
