Issued Patents All Time
Showing 26–41 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7276277 | Micromechanical component, in particular a sensor element, having a stabilized membrane and a method of producing such a component | Robert Siegel | 2007-10-02 |
| 7273764 | Sensor with at least one micromechanical structure, and method for producing it | Frank Reichenbach, Stefan Pinter, Frank Henning, Helmut Baumann, Franz Laemer +2 more | 2007-09-25 |
| 7057248 | Semiconductor component, particularly a micromechanical pressure sensor | Helmut Sautter, Frank Schatz, Juergen Graf, Udo-Martin Gomez, Kersten Kehr | 2006-06-06 |
| 7045382 | Method for producing micromechanic sensors and sensors produced by said method | Hubert Benzel, Heribert Weber, Frank Schaefer | 2006-05-16 |
| 7040160 | Flow sensor | Thorsten Pannek, Uwe Konzelmann | 2006-05-09 |
| 7037438 | Method for production of a semiconductor component and a semiconductor component produced by said method | Hubert Benzel, Heribert Weber, Frank Schaefer | 2006-05-02 |
| 6972447 | Semiconductor component having a first earlier structure differing from a second earlier structure | Hubert Benzel, Frank Schaeffer | 2005-12-06 |
| 6936902 | Sensor with at least one micromechanical structure and method for production thereof | Frank Reichenbach, Stefan Pinter, Frank Henning, Helmut Baumann, Franz Laemer +2 more | 2005-08-30 |
| 6906392 | Micromechanical component | Hubert Benzel, Heribert Weber, Michael Bauer, Thorsten Pannek, Frank Schaefer +1 more | 2005-06-14 |
| 6803637 | Micromechanical component with different doping types so that one type is anodized into porous silicon | Hubert Benzel, Heribert Weber, Frank Schaefer | 2004-10-12 |
| 6759265 | Method for producing diaphragm sensor unit and diaphragm sensor unit | Thorsten Pannek | 2004-07-06 |
| 6726815 | Electrochemical etching cell | Wilhelm Frey, Franz Laermer | 2004-04-27 |
| 6677249 | Method for manufacturing breakaway layers for detaching deposited layer systems | Franz Laermer, Wilhelm Frey | 2004-01-13 |
| 6555443 | Method for production of a thin film and a thin-film solar cell, in particular, on a carrier substrate | Wilhelm Frey, Manfred Moellendorf | 2003-04-29 |
| 6521313 | Method for producing a diaphragm sensor unit and diaphragm sensor unit | Thorsten Pannek | 2003-02-18 |
| 6506621 | Method for producing a diaphragm sensor array and diaphragm sensor array | Thorsten Pannek, Robert Siegel | 2003-01-14 |