Issued Patents All Time
Showing 26–38 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6648389 | Process for manipulating components, a microtool for implementing the process, and a process for manufacturing the microtool or microtool parts | Karsten Funk | 2003-11-18 |
| 6645800 | Method for the production of a field-effect structure | Franz Laermer, Klaus Heyers | 2003-11-11 |
| 6592664 | Method and device for epitaxial deposition of atoms or molecules from a reactive gas on a deposition surface of a substrate | Franz Laermer, Klaus Heyers | 2003-07-15 |
| 6555443 | Method for production of a thin film and a thin-film solar cell, in particular, on a carrier substrate | Hans Artmann, Manfred Moellendorf | 2003-04-29 |
| 6489864 | Filter for electric signals | Karsten Funk | 2002-12-03 |
| 6486665 | Magnetic field sensor having deformable conductor loop segment | Karsten Funk | 2002-11-26 |
| 6443008 | Decoupled multi-disk gyroscope | Karsten Funk, Markus Lutz | 2002-09-03 |
| 6372656 | Method of producing a radiation sensor | Franz Laermer | 2002-04-16 |
| 6369931 | Method for manufacturing a micromechanical device | Karsten Funk | 2002-04-09 |
| 6360604 | Acceleration sensor | Franz Laermer, Bernhard Elsner | 2002-03-26 |
| 6217647 | Method for producing a monocrystalline layer of a conducting or semiconducting material | Franz Laermer | 2001-04-17 |
| 6174746 | Method of producing optical waveguides | Manfred Moellendorf, Franz Laermer | 2001-01-16 |
| 5996409 | Acceleration sensing device | Karsten Funk, Franz Laermer, Bernhard Elsner | 1999-12-07 |