Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9206034 | Micromechanical component having a bond joint | Heiko Stahl, Hans-Peter Baer | 2015-12-08 |
| 7176540 | Method for producing micromechanical structures and a micromechanical structure | Wilhelm Frey | 2007-02-13 |
| 6960536 | Method for producing integrated microsystems | Wilhelm Frey, Franz Laermer | 2005-11-01 |