Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11112288 | Thermal gas property sensor | Oleg Grudin | 2021-09-07 |
| 7342703 | Micro-mechanical beam protective support structures wherein at least two adjacent support structures touch each other upon reaching a predetermined bending action | Wilhelm Frey, Zhiyu Pan | 2008-03-11 |
| 7177068 | Apparatus, method and system for providing enhanced mechanical protection for thin beams | Wilhelm Frey, Zhiyu Pan | 2007-02-13 |
| 6901800 | Differential in-plane tunneling current sensor | Wilhelm Frey, Zhiyu Pan | 2005-06-07 |
| 6895818 | Differential in-plane tunneling current sensor | Wilhelm Frey, Zhiyu Pan | 2005-05-24 |
| 6856067 | Device and method for electrostatically levitating a disk and method for using an electrostatic levitated disk as a sensor | Wilhelm Frey, Zhiyu Pan | 2005-02-15 |
| 6749308 | Micromirror | Karsten Funk | 2004-06-15 |
| 6672732 | Micromechanical oscillating device | Wilhelm Frey, Karsten Funk | 2004-01-06 |