Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6952041 | Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same | Markus Lutz, Aaron Partridge | 2005-10-04 |
| 6936491 | Method of fabricating microelectromechanical systems and devices having trench isolated contacts | Aaron Partridge, Markus Lutz | 2005-08-30 |