Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8637945 | Component having a micromechanical microphone structure, and method for its production | Frank Reichenbach, Thomas Buck, Jochen Zoellin, Franz Laermer, Ulrike Scholz +1 more | 2014-01-28 |
| 8466042 | Method for manufacturing separated micromechanical components situated on a silicon substrate and components manufactured therefrom | Franz Laermer, Christina Leinenbach | 2013-06-18 |
| 8353213 | Sensor element for sensing accelerations in three spatial directions | Jochen Zoellin, Axel Franke, Christina Leinenbach | 2013-01-15 |