Issued Patents All Time
Showing 76–87 of 87 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7755152 | Semiconductor component configured as a diaphragm sensor | Hubert Benzel, Frank Schaefer, Simon Armbruster, Gerhard Lammel, Joerg Brasas | 2010-07-13 |
| 7647832 | Micromechanical device and method for producing a micromechanical device | Joerg Muchow, Hubert Benzel, Markus Lang, Regina Grote, Simon Armbruster +2 more | 2010-01-19 |
| 7572660 | Electrical through-plating of semiconductor chips | Hubert Benzel, Stefan Finkbeiner, Julian Gonska | 2009-08-11 |
| 7572661 | Method for manufacturing a micromechanical sensor element | Hubert Benzel, Stefan Finkbeiner, Matthias Illing, Frank Schaefer, Simon Armbruster +2 more | 2009-08-11 |
| 7569412 | Method for manufacturing a diaphragm sensor | Hubert Benzel, Frank Schaefer, Simon Armbruster, Gerhard Lammel, Joerg Brasas | 2009-08-04 |
| 7555956 | Micromechanical device having two sensor patterns | Hubert Benzel | 2009-07-07 |
| 7494839 | Method for manufacturing a membrane sensor | Hubert Benzel, Frank Schaefer, Simon Armbruster, Gerhard Lammel, Joerg Brasas | 2009-02-24 |
| 7453254 | Microstructured chemical sensor | Heribert Weber, Doris Schielein, Christian Krummel | 2008-11-18 |
| 7354786 | Sensor element with trenched cavity | Hubert Benzel, Stefan Finkbeiner, Matthias Illing, Frank Schaefer, Simon Armbruster +2 more | 2008-04-08 |
| 7279759 | Membrane sensor | Roland Muller-Fiedler, Hans Hecht, Joerg Muchow, Matthias Fuertsch, Andreas Stratmann +6 more | 2007-10-09 |
| 7213465 | Micromechanical sensor | Hubert Benzel, Frank Schaefer | 2007-05-08 |
| 7148077 | Micromechanical structural element having a diaphragm and method for producing such a structural element | Matthias Fuertsch, Stefan Pinter, Heribert Weber, Frank Fischer, Lars Metzger +1 more | 2006-12-12 |