Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12353126 | Method and device for qualifying a mask of a lithography system | Carola Blaesing-Bangert, Steffen Weissenberg | 2025-07-08 |
| 11619882 | Method and apparatus for characterizing a microlithographic mask | Ulrich Matejka, Holger Seitz, Thomas Frank | 2023-04-04 |