Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8451440 | Apparatus for the optical inspection of wafers | Kurt Hahn, Roland Hedrich, Lambert Danner, Albert Kreh, Wolfgang Vollrath +4 more | 2013-05-28 |
| 7209243 | Illumination device, and coordinate measuring instrument having an illumination device | Franz Cemic, Lambert Danner | 2007-04-24 |
| 7050223 | DUV-capable microscope objective with parfocal IR focus | — | 2006-05-23 |
| 7019910 | Inspection microscope and objective for an inspection microscope | — | 2006-03-28 |
| 6975409 | Illumination device; and coordinate measuring instrument having an illumination device | Franz Cemic, Lambert Danner | 2005-12-13 |